Manufacturing process of micro-nanostructured metal nitrides – NITRURATION

The goal of this project is to develop a process for metal nitride films micro-nanostructuring from the nitriding of metal oxide sol-gel coatings (TiO2, ZrO2, etc.) micro-nanostructured. This innovative approach has several advantages, such as obtaining micro-nanostructured coatings of metal nitride on substrates of various types, shapes and sizes. It also allows a direct micro-nanostructuring method by optical lithography or by embossing (NanoImprint), thus facilitating its industrial valorization. This project also aims to establish a new thematic axis around functional micro-nanostructured coatings at the Hubert Curien laboratory and to initiate new collaborations in the field of optical sensors (plasmonics based sensors), energy (IR filter…), as well as Metasurfaces.