Nanoscale mechanical and thermal imaging of nan-owires using scanning electron microscopy – IMAGIQUE

Mapping thermal and mechanical properties at the nanoscale and non-destructively represents a considerable challenge, that is not met by any existing technique. In this project, we propose a method of evaluating the mechanical and thermal properties of nanowires that is fast, non-destructive and can be used for rapid and statistical evaluation prior to device integration. This project will exploit electro-mechanical coupling inside a scanning electron microscope to map the thermal and mechanical properties of nanowires. The objectives are (1) to understand and control the electron beam probe – nanowire interaction (2) to determine hardly accessible global thermal and mechanical properties of nanowires and (3) to map heat conduction and mechanical damping with nanometer scale resolution. Our concept rests on two pillars. First, our ability to detect and drive nanowire mechanical vibrations using a focused electron beam with a motion sensibility down to the femtometer. Second, the recent demonstration of the extension of the theorem of fluctuation-dissipation by probing the local dissipation of coated microbeams using a laser via the driving of their mechanical modes. Finally, this is a fundamental research project with a long-term potential to become a generic nano-imaging tool with large impact in nanotechnology laboratories and industries, where non-destructive imaging tools dedicated to nanomaterials are still missing.