DS0305 -

Development, characterization and batch fabrication of atomic force microscopy cantilevers for tip-enhanced Raman spectroscopy applications – TIPTOP_1

Submission summary

TITOP_1 is an industrial collaborative project aiming to overcome the current technological blocking point in Tip Enhanced Raman Spectroscopy (TERS), namely the availability of tips for Atomic Force Microscopy (AFM) in TERS applications, with high performance, reliability, reproducibility and easy access.
The TIPTOP_1 project is based on preliminary results showing an innovative geometry, compatible with micro-electronics manufacturing processes. The scientific and industrial objectives are :
- Micro / nano fabrication of such AFM-TERS probes, with the final goal of manufacturing in series
- Demonstrating the use of those probes in reference systems (some of them not accessible to today’s probes)
- Applying those probes for nanoelectronics, especially to measure localized strain in semiconductor structures (Si transistor)

Project coordination

Philippe de Bettignies (HORIBA FRANCE SAS)

The author of this summary is the project coordinator, who is responsible for the content of this summary. The ANR declines any responsibility as for its contents.


CEA-LETI Commissariat à l'énergie atomique et aux énergies alternatives
IEMN Institut d'electronique, de microelectronique et de nanotechnologie
LPICM Laboratoire de Physique des Interfaces et des Couches Minces

Help of the ANR 529,312 euros
Beginning and duration of the scientific project: October 2016 - 36 Months

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