Probe for compact Near Field Optical Microscope – SIROCO

Scanning near fiel optical microscopy is still little-used in life sciences despite of the fact that the technique has a great potential to answer to issues, particularly when high optical resolution is needed and for localized interactions studies. This is probably due to experimental implementation difficulties. Near field probe is the heart of the microscope as well as the technical key to get more customers to use SNOM.
So we project to realize the proof of concept of an innovative probe made of hybrid organo-mineral sol-gel material, cantilever-type, integrating optical function - here a wavelength filter. With this aim in view, a new batch-process-based fabrication on 4'' substrate will be developed and validated. It should make it possible to simultaneously fabricate 20 probes, leading to a reduced cost and to single-use consumable.
The programme comprises 4 main tasks that are, basic material layer deposition optimization and characterization, simulation to conceive the probes and optimize their opto-geometrical parameters, steps of micro structures (MOEMS) fabrication, final probes properties (resolution, transmission) characterization.
The three partners contribute to the project with their complementary know-how and means that are required to carry through the project : in the field of material for partner L2C((Laboratoire Charles Coulomb), in the field of micro-technology for partners IEF(Institut d'Electronique Fondamentale) and IES (Institut d'Electronique du Sud) with the access to two technology centers, in the field of simulation and characterization for partner IES.
The protection by patent applications and the transfer of the future results to industrial partners will be conducted by the Direction of Partnerships “IRIS” of the University Montpellier 2. This technology transfer will rely in particular on the European Patent Application No. EP11305043.9 filed earlier in the project.