PNANO - Nanosciences et Nanotechnologies
Sonde atomique tomographique pour la caractérisation et l’amélioration des siliciures avancés de la nanoélectronique – TAPAS
Project coordination
Dominique MANGELINCK (Organisme de recherche)
The author of this summary is the project coordinator, who is responsible for the content of this summary. The ANR declines any responsibility as for its contents.
Partner
Help of the ANR 1,101,211 euros
Beginning and duration of the scientific project:
- 36 Months
