Cantilevers en carbure de silicium à piézorésistivité métallique pour microscopie à force atomique en mode dynamique à très haute fréquence – NANOSENS

Sebastien Gauthier (Organisme de recherche)

The author of this summary is the project coordinator, who is responsible for the content of this summary. The ANR declines any responsibility as for its contents.

Help of the ANR 879,093 euros
Beginning and duration of the scientific project: - 48 Months

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