PNANO - Programme National en Nanosciences et Nanotechnologies
2005
Simulation atomique du système SiGe dans le contexte de la micro-électronique : oxydation, contrainte, diffusion – OSiGe_Sim
Project coordination
Organisme de recherche
The author of this summary is the project coordinator, who is responsible for the content of this summary. The ANR declines any responsibility as for its contents.
Partnership
Help of the ANR 135,659 euros
Beginning and duration of the scientific project:
- 36 Months
