Blanc SIMI 9 - Sciences de l'information, de la matière et de l'ingénierie : Sciences de l'ingénierie, matériaux, procédés, énergie

Wideband Silicon Measuring Microphone for High-frequency Acoustics (10 kHz - 1 MHz) – SIMMIC

Wideband Silicon Measurement Microphone for High-frequency Acoustics (10 kHz - 1 MHz)

Microphone for aeroacoustic experiments

Design and calibration of high frequency microphone

- To get a microphone to measure the sound pressure at frequencies above 100 kHz.<br />- The target performance: frequency response [10 kHz, 1 MHz], the sound pressure up to 4 kPa, membrane surface less than 1 mm2.<br />- A comparable microphone is not currently available on the market.<br />- Method of calibration of high frequency microphones.<br />

- Finite element model
- Reduced model
- Method of microphones calibration by a wave «N«

- The complete model of the microphone including membrane perforation.
- The fabrication process of the microphone has been validated.
- The electrical circuit has been designed and fabricated.
- Validation of the calibration method (M18: achieved, any major difficulty).
- Characterization of the first sensor prototype.

Validation of the microphone in real conditions.

Presentations on the following conferences :
Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, Aix-en Provence, France.
19th IFIP/IEEE International Conference on Very Large Scale Integration, VLSI-SoC, October 3–5, 2011, Hong Kong, China.
Forum Acusticum, Aalborg, Denmark, 2011. ACUSTICUM2011/285, CDROM ISSN.
11ème Congrès Français d'Acoustique, 2012 Annual IOA Meeting, Nantes-France, 2012.
11ème Congrès Français d'Acoustique & 2012 Annual IOA (Institute of Acoustics, UK), 13-17 April, Nantes.
11th international workshop on micromachined ultrasonics transducers, Tours-France, 2012.
11th Annual IEEE Conference on Sensors, Oct. 28-31, 2012, Taipei, Taiwan.

Résumé anglais :

The objective of this project is to develop a novel microphone for accurate measurements of airborne acoustic waves in the frequency range [10 kHz, 1 MHz] and pressure levels up to 4 kPa. Such high-frequency microphone with flat and calibrated frequency response is not yet commercially available. This limits some advances in the field of aeroacoustics and nonlinear acoustics (shockwaves measurement), and also limits the use of downscaled experiments in laboratory to study long range sound propagation (outdoor acoustics) or room acoustics. The goal of this project is to deliver a calibrated new microphone that will allow acousticians to measure acoustic pressure waves in the frequency range [10 kHz, 1 MHz]. The main project output will be a demonstrator consisting of a sensor itself associated with a full-custom front-end electronics and a calibration procedure. To overcome this technical challenge, micro-electronics and micro-systems (MEMS) technology will be used. An important effort has been devoted in past decades to develop low-cost MEMS (Micro-Electro-Mechanical Systems) silicon microphones in the audible frequency range (mainly for mobile phones), however no high performance measuring microphone with large frequency range and high dynamic range is available. The proposed integrated MEMS microphone consists in a small size membrane with piezoresistive sensors, fabricated in a silicon-based technology, coupled to a specifically designed microelectronic low noise amplifier. A smaller membrane than in classical microphone will allow covering a higher frequency range, and the choice of a piezoresistive transduction principle will allow to measure higher acoustic pressure dynamic range than capacitive transducers. In order to optimize the system performances, the sensor and its front-end electronics will be modelled with a system approach. The modelling, design and fabrication tasks will be completed with research and development of an absolute calibration method valid for frequencies in the frequency range [10 kHz, 1 MHz]. The method is based on the measurement of shockwaves. One guideline of this project is the use of available fabrication process in order to demonstrate that industrial production could be done shortly after the end of the project. To successfully reach the ambitious objectives of this project, four partners from different fields will gather and share their knowledge in Microsystem design & fabrication, modelling, Microelectronics and acoustics.

Project coordinator


The author of this summary is the project coordinator, who is responsible for the content of this summary. The ANR declines any responsibility as for its contents.



Help of the ANR 380,260 euros
Beginning and duration of the scientific project: - 36 Months

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