Gallium nitride on silicon MEMS accelerometer – AMGaSi

Marc Faucher (CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE - DELEGATION REGIONALE NORD-PAS-DE-CALAIS ET PICARDIE) – marc.faucher@iemn.fr

The author of this summary is the project coordinator, who is responsible for the content of this summary. The ANR declines any responsibility as for its contents.

IEMN CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE - DELEGATION REGIONALE NORD-PAS-DE-CALAIS ET PICARDIE
CRHEA CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE - DELEGATION REGIONALE COTE D'AZUR
FEMTO-ST ECOLE NATIONALE SUPERIEURE DE MECANIQUE ET DES MICROTECHNIQUES - ENSMM

Help of the ANR 296,724 euros
Beginning and duration of the scientific project: January 2012 - 36 Months

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