LabCom - Vague1 - Laboratoires communs organismes de recherche publics – PME/ETI - Vague 1

Laser platform for EUV metrology – NanoLite

Submission summary

The joint laboratory NanoLite aims at bringing together one academic laboratory expert in developing laser EUV light sources (LIDYL) and one industrial laboratory specialized in the spatio-temporal shaping of those beams (Imagine Optic). NanoLite will offer on the one hand a legal framework favourable to the valorisation of products stemming from fundamental research by a company and, on the other hand, a physical environment consisting in a fully equipped laboratory with state of the art scientific instruments. This joint laboratory will be implemented at LIDYL, at the Orme des Merisiers site close to the related scientific community and to the most advanced national facilities in the domains of laser optics (ATTOLab, CILEX) and synchrotron radiations (SOLEIL).
The central theme of the laboratory will be to develop optical systems oriented towards metrology. Indeed, the extreme ultraviolet spectral range (EUV), especially around 13nm, is critical for multiple fields, from the needs of synchrotron facilities to microelectronics (lithography) through academic research (magnetic domain dynamics imaging,…). The joint laboratory will draw on the complementary expertise of LIDYL in the generation of short wavelength ultrashort and coherent radiations by laser and of IO in characterization and generation of wavefronts (wavefront sensors, optic quality measurements, active optics, …). The joint laboratory proposes:
1. to develop a high performance beamline in the EUV range, with a specific architecture allowing in particular to reach very good emission stability, high average powers and access to a large photon energy range. This first step, because of its characteristics, is per se a first major innovative step. It will thus allow the development and validation of new technological building blocks. This development will rely on the LIDYL expertise, but IO’s equipment and know-how will be crucial to make the beamline stable and reliable.
2. to develop, implement and optimize unique technological blocks from IO know-how in order to improve continuously the beamline performances and capabilities:
o In the domain of metrology, new generation wavefront sensors will be developed in the energy range of interest, including new capabilities as measurement on very large numerical aperture beams, spectrally resolved spatial phase characterization and high precision X-EUV optics certification
o In the domain of beam shaping, a new generation of active optics optimized for EUV radiation will be developed. This will allow researchers to reach high energy densities through nanofocalization.
3. the ramp-up of scientific and industrial applications from the NanoLite ecosystem, thanks to the beamline:
o The beamline operation for high precision, at wavelength metrology of X-EUV optics, in their final configuration, answering thus in the short term to the very large market of synchrotron facility upgrades.
o Nanoscale imaging of nanostructured extended samples (holographic masks, meta-materials…) with spatial resolution of the order of 13nm. Additionally, those breakthrough will be applied to femtosecond imaging of ultrafast demagnetization studies, and will ideally complement the experiments performed on ATTOLab.
Ultimately, the NanoLite platform raises a significant opportunity to commercialize an experimental workstation for metrology and/or imaging targeting key academic and industrial players in the field.

Project coordination

Willem Boutu (Laboratoire Interactions, Dynamiques et Lasers (UMR 9222))

The author of this summary is the project coordinator, who is responsible for the content of this summary. The ANR declines any responsibility as for its contents.


LIDyL Laboratoire Interactions, Dynamiques et Lasers (UMR 9222)
IO Imagine Optic

Help of the ANR 350,000 euros
Beginning and duration of the scientific project: December 2019 - 54 Months

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