CE42 - Capteurs, imageurs et instrumentation

Waveguide plasma cell for terahertz spectroscopy – WASPE

Submission summary

The WASPE project aims to design and manufacture a new type of instrument suitable for plasma spectroscopy. New types of plasma treatments are indeed being considered in industry in order to reduce the emissions of volatile organic compounds (VOCs) into the atmosphere, but to optimize them it is also necessary to better understand the reaction processes at work in this type of process. WASPE offers a new type of plasma cell suitable for analyzing the chemical composition of plasma using terahertz (THz) spectroscopy. In principle, this rotational spectroscopy makes it possible to identify with great sensitivity and selectivity the chemical species that make up a gas. The advantages of this spectroscopy are particularly interesting in the case of a plasma that can contain many more or less reactive species: molecules, radicals and ions. To maximize the detection sensitivity, however, it is necessary to optimize the overlap between the THz wave and the plasma. A low loss THz waveguide is needed, but in the context of a plasma cell, it cannot be a metallic waveguide. The cell will be based on the use of a new type of dielectric waveguide based on a disruptive design, it will be placed in a Fabry-Pérot THz resonator also made up of dielectric mirrors. This new type of cell will then be used to better understand the complex chemical processes at work in the plasma. The project encompasses a broad spectrum from electromagnetic design, fabrication, THz characterization and spectroscopy use of the plasma cell to better understand the processes. The consortium (IEMN, XLIM, LPCA, ISMO) brings together the knowledge and know-how necessary to achieve the scientific objectives and the feasibility of the project is supported by preliminary results.

Project coordination

Jean-francois LAMPIN (UMR 8520 - IEMN - Institut d'Electronique, de Microélectronique et de Nanotechnologie)

The author of this summary is the project coordinator, who is responsible for the content of this summary. The ANR declines any responsibility as for its contents.


LPCA Université Littoral-Côte d'Opale
ISMO Centre national de la recherche scientifique
IEMN UMR 8520 - IEMN - Institut d'Electronique, de Microélectronique et de Nanotechnologie

Help of the ANR 622,811 euros
Beginning and duration of the scientific project: January 2023 - 42 Months

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