Focused Ion beam by correlated electron feedback – FIBback

This research project aims to achieve the sub-nanometric regime for imaging and focusing of ion beams. In order to properly control the characteristics of these ion beams (coherence, aberration, energy, dispersion, etc.) we propose to take advantage of the correlation between each electron/ion pair, resulting from the ionization of a laser-cooled cesium atom jet, to actively control the ion passing through the Focused Ion Beam (FIB) based on the extra information given by the electron. This development of a controlled source of ions at the sub-nanometric scale will open unique perspectives for implantation, etching, deposition and imaging experiments and will allow the development of a revolutionary analytical instrument in the semiconductors field.