Multi-Dof Dynamic NanoRobotics Inside Electron Microscopes – DyNaBot

The project is structured into four technical work packages (WPs), one management WP, and one dissemination and valorization WP, in order to manage a scientific program organized around four main axes:

(1) the study of robotic motion generation at the nanometric scale, leading to the proposal of an original nanorobotic architecture capable of achieving significant mobility around a point of interest with nanometric precision;

(2) the study of contact interactions between the robot and its environment, resulting in the development of an active sensor able to dynamically control these interactions within an electron microscope (EM);

(3) the study and proposal of a digital twin for 3D observation of the environment and prediction of the robotic system states, enabling operation beyond the acquisition frequency limits of electron microscopes;

(4) the development of two demonstrators representative of typical scientific and industrial applications, aimed at showcasing the exceptional potential of the DyNaBot approach: the first consists in generating a 3D map of the elastic properties of hydrated samples, and the second in fabricating a nanodevice through robotic assembly.

Concretely, the project is based on several complementary approaches in micro- and sub-millimetric robotics. It develops fabrication processes for articulated 3D structures, as well as polyarticulated robotic architectures integrating independent actuators based on laser or electrothermal principles. Multiphysics modeling is used to predict and control their behavior according to the targeted tasks. Innovative force–displacement sensors enable precise measurement of interactions and forces, while dedicated algorithms ensure accurate and intuitive control via a haptic interface.

The project also includes tools for manipulation within an electron microscope, enabling assembly and characterization at very small scales. A digital twin developed in Unreal Engine is calibrated using AFM data. Finally, an advanced model provides a detailed description of probe–sample interactions, complemented by control algorithms ensuring precise force/position regulation and automated micrometric positioning.

The Dynabot project has generated significant outcomes in terms of future prospects and the structuring of new research initiatives. Its results have led to the acquisition of four major European and national funding grants, substantially strengthening the collaboration network. These include the European projects RAIDO and ITN, as well as the PEPR Miniro and EUR StémiFib programs, involving several academic partners, some of which directly emerged from Dynabot. From a scientific perspective, the project is also distinguished by a strong publication record, with numerous journal and conference papers, including two finalists for international awards, as well as contributions to the technological platforms of the TIRREX infrastructure.

From both scientific and application-oriented perspectives, Dynabot has enabled significant advances in precision robotics and instrumentation. Systems capable of measuring forces and displacements with nanometric and micronewton resolutions have been developed, along with innovative polyarticulated robotic architectures. The project also validated photothermal-mechanical models for laser actuation and implemented a digital twin within an electron microscope environment. In addition, research was conducted on QTF probes operating in contact mode, leading to the development of advanced interaction models, automated micro-positioning systems, and mechanical characterization protocols validated on polymer and biological materials, notably zebrafish eggs.

Finally, the practical applications illustrate the project’s impact across several industrial and scientific domains. Dynabot has enabled the precise characterization of natural fibers, paving the way for their integration into bio-based composites. It has also introduced an innovative robotic approach for the manipulation and study of solid lubricant particles, offering prospects for reducing energy losses and pollution associated with liquid lubricants. Lastly, the use of QTF probes opens major opportunities in biology, particularly for in-depth mechanical exploration of cells, overcoming certain limitations of existing techniques such as AFM.

The Dynabot project has demonstrated that it is possible to perform robotic tasks at small scales and within an electron microscope without compromising either performance levels or the human expertise required to interpret results. It thus opens the way for the use of microrobotic systems beyond specialists in robotics. This point is essential, as the majority of electron microscope users have little or no background in robotics (end users typically include biologists, materials scientists, and electronics specialists). We have shown that non-expert users can effectively operate robotic systems when the technology is made “transparent” in its use, making it highly practical and accessible. The project’s approach has been validated through several key and complementary application cases (see “Results” section), clearly demonstrating that precision robotics provides an original solution and enables long-standing challenges to be addressed in a straightforward manner.

These findings have guided us toward broader (macro-level) perspectives such as the following:

The development of robotic platforms capable of performing key tasks at small scales, targeting well-identified application cases (with increased Technology Readiness Levels), appears highly relevant. The Center for Micro- and Nano-Robotics, established during the Dynabot project, is dedicated to developing platforms derived from research that address well-known challenges for which no commercial solutions currently exist. We also contribute to the European RAIDO project, particularly in the characterization of natural fibers for the deployment of bio-based composites.

The deployment of miniature robotics at the national (French) and international levels, both in academia and industry, appears more relevant than ever. The recent acquisition of major funding has positioned Dynabot researchers in leading roles for coordinating these efforts, notably through projects such as ITN and the PEPR initiative on miniature robotics.

André, A. N.; et al. «Automating Robotic Micro-Assembly of Fluidic Chips and Single Fiber Compression Tests Based-on T Visual Measurement With High-Precision Fiducial Markers«. IEEE Transactions on Automation Science and Engineering. Jan 2024, 21, 1, 353-366.

Adam, G.; Boudaoud, M.; Reynaud, V.; Agnus, J.; Cappelleri, D. J.; Clévy, C. An Overview of Microrobotic Systems for Microforce Sensing. Annual Review of Control, Robotics, and Autonomous Systems. 2024, 7.

Hannouch, R.; et al. «Robotic-Based Selection, Manipulation and Characterization of 3D Microscale Particles with Complex Structures in SEM«. International Conference on Manipulation, Automation and Robotics at Small Scales (MARSS). Abu Dhabi, United Arab Emirates. 2023, 1-6.

Awde, A.; Boudaoud, M.; Macioce, M.; Régnier, S.; Clévy, C. «A Microrobotic Approach for the Intuitive Assembly of Industrial Electrooptical Sensors Based on Closed-Loop Light Feeling«. IEEE/ASME Transactions on Mechatronics. Dec 2022, 27, 6, 5462-5471.

Electron Microscopes (EMs) are widespread in a wide range of applications due to their unique and powerful visualization capabilities. Several key technologies have recently emerged that allow for (1) local additive/substrative fabrication by ion beams at the sub-micrometer scale (2) 3D and dynamic motion by nanopositioning robots inside these EMs. These technologies are particularly promising for nanodevice fabrication or multimodal characterization at the ultimate scale, but historical approaches are based on a planar and quasi-static approach that considerably limit reproducibility, speed, automation capabilities, and the consideration of local effects, which are nevertheless predominant, and often induce irreversible damages to the studied sample or the fabricated device.

In this context, DyNaBot will study in depth the paradigm of safe nanorobotic motions generation in EMs to bring them dynamic and three-dimensional capabilities. This approach, which is disruptive at this scale, aims at revolutionizing the capabilities of EMs by transforming them into nanofactories allowing each user to perform complex manufacturing (additive, substractive), manipulation, assembly and robotic characterization tasks at the sub-micrometer scale. To this end, the project aims to go beyond the state of the art by proposing a compact and agile robotic structure capable of dynamically controlling the physical interactions between the robot and the object in the highly variable environment of EMs. A digital twin integrating the multiphysical dynamic model of the platform and strongly contributing to the observation of weak signals will allow an intuitive use centered on human expertise.
The project is organized in 4 technical Work Packages (WP), a management WP and a diffusion and valorization WP, to manage a scientific program of 4 main axes: (1) the study of generating robotic movements at the nanometric scale leading to the proposal of an original nanorobotic architecture capable of bringing important mobilities around a point of interest with a nanometric precision (2) the study of contacts between the robot and its environment leading to the proposal of an active sensor capable of controlling these interactions dynamically within an EM (3) the study and the proposal of a digital twin allowing to generate fast movements of nanometric precision via an intuitive environment and capable of a three-dimensional dynamic representation taking into account local effects in spite of poor and slow measurement signals (4) the development of 2 demonstrators representative of typical scientific and industrial applications aiming at demonstrating the impact and the exceptional potential of the approach proposed in DyNaBot: the first one consists in establishing the characterization of dynamic three-dimensional biophysical properties of hydrated samples, the second one consists in realizing the three-dimensional manipulation of flexible nanowires and in realizing a nano-product integrating them by robotized assembly.

To ensure the success of DyNaBot, which offers a state-of-the-art international challenge, FEMTO-ST, ISIR and CEA-List will bring their unique complementary expertise in modeling and control for nanorobotics as well as in human-robot interactions for the industry of the future in relation to nanotechnology.
The economic and societal impacts of DyNaBot are potentially very important, making possible massive, multi-modal and dynamic characterization inside EMs as well as the transformation of EMs into nanofactories allowing the realization in-situ of complete and varied processes for the manufacturing of innovative nanodevices.