CE42 - Capteurs, instrumentation

All-Fibre Extreme-UV source for atomic probe tomography – FLEX-UV

Submission summary

FLEX-UV’s objective is to develop a source of extreme UV (EUV) photons via the process of high-harmonics generation. The source will be portable and will be used to improve the specificity of the atomic probe tomograph. The seed mid-infrared femtosecond laser will be developed at XLIM and pre-industrialized at NOVAE. The seed pulses will be compressed down to 30 fs and delivered single-mode via a specialty optical fiber. The harmonics will be generated at CEA in solid-state nano-emitters, inscribed onto the end facet of the delivery fiber. We will illustrate the potential of the EUV source by increasing the performance of the atom probe tomograph. The fibre-based source will produce few cycle pulses in the mid-infrared with several MW of instantaneous power. The average power on the Watt level will ease the application. The main advantage of the proposed EUV source is its portability as the fibered source can be brought in close proximity to the target to analyze.

Project coordination

Sebastien FEVRIER (XLIM)

The author of this summary is the project coordinator, who is responsible for the content of this summary. The ANR declines any responsibility as for its contents.


EP International center for Ultrafast Science and Technology
GPM Groupe de Physique des Matériaux

Help of the ANR 584,915 euros
Beginning and duration of the scientific project: December 2020 - 42 Months

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