ASTRID-Maturation - Accompagnement spécifique des travaux de recherches et d'innovation Défense : Maturation et Valorisation

Maturation of the miniature resonant magnetometer – MAGRIT II

Submission summary

This project aims at developing a new type of MEMS magnetometer based on the measurement of the frequency variation of a micro resonator on which is deposited a thin layer of magnetic ferromagnetic material. This new concept of vibrating micro-magnetometer allows a favorable compromise between performance and miniaturization/power consumption. It will meet the requirements of new dual and demanding applications of magnetometry, such as the improvement of low cost inertial measurement units for indoor navigation and the navigation of drones or missiles, or the monitoring of areas by sensor networks.
An ASTRID project conducted between ONERA, SYSNAV and the IEF between 2015 and 2018 has made it possible to develop the various technological bricks constituting the magnetometer, as well as the associated calibration bench:
- an original configuration of ferro / anti ferro magnetic thin film stacks has been designed, realized and validated experimentally,
- a complete model of the resonator including the effect of thin magnetic layers has been developed (analytical model and finite element simulations) and exploited to design an original torsional vibrating resonator configuration. Several resonators were made and tested in the ONERA clean room.
- An automated magnetometer calibration bench has been designed and partly realized.

At the end of the project, first complete prototypes of magnetometers were realized and the first characterizations carried out. They consist of two miniature resonators on which a stack of thin magnetic layers have been deposited, these two resonators are integrated in a vacuum box and connected to an electronic oscillation circuit.
The measurements carried out validated the feasibility of the sensor as well as the possibility of achieving the specified performances. The aim of the ASTRID Maturation project is, on the one hand, to optimize the various existing technological bricks: optimization of the geometry of the magnetic strips deposited on the resonator (without changing the already optimal deposition process), optimizing the configuration of the resonator, based on the results of characterization of the first resonator, and the modeling tools developed, optimize the packaging and layout of the electronic circuits in order to achieve a prototype closer to the final sensor,finalize the design of the automated measuring bench, make it and use it to calibrate and characterize the final prototypes.

These optimization steps will precede a phase of realization and characterization of complete prototypes of sensor in representative environment. This will allow to mature the TRL 4 obtained at the end of the ASTRID project, up to TRL 6.
The preparation of the pre-industrialization phase will also be carried out with the precise definition of the methods of realization and calibration of the magnetometers as well as the definition of the industrial assembly.

Project coordinator

Monsieur Raphael LEVY (Département Physique Instrumentation Environnement Espace)

The author of this summary is the project coordinator, who is responsible for the content of this summary. The ANR declines any responsibility as for its contents.


UPSud / C2N Université Paris Sud / Centre de Nanosciences et de Nanotechnologies
DPHY Département Physique Instrumentation Environnement Espace

Help of the ANR 499,178 euros
Beginning and duration of the scientific project: January 2020 - 36 Months

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