P2N - Nanotechnologies et Nanosystèmes

optimising MOcvd / ald growth of Oxydes Nanostructures for solar photon conversion by combining modeling and in situ synchrotron X-ray and optical analysis – MOON

Submission summary

Our project aims at improving the basic knowledge of the nucleation process of oxide-based nanowires (NWs) and nanocrystalline thin films that should result in a breakthrough technology in the field of materials energy and more precisely of solar photon conversion. The purpose is to investigate in situ and in real time, the gaz-substrate interaction, the nucleation mechanism, the transition to the steady state growth, the substrate/nanostructures interface quality, the relaxation mechanisms and the structural defects for instance within a specific growth chamber dedicated to metal-organic chemical vapour deposition (MOCVD) and metal-organic atomic layer deposition (ALD). The MOCVD/ALD growth reactor will be designed to be implemented on the diffractometer of the SIRIUS beamline at the French synchrotron SOLEIL (St-Aubin). The set-up will permit surface X-rays scattering (diffraction and small angle scattering in grazing incidence) combined with surface X-ray spectroscopy as well as optical growth characterizations with RAMAN-LIDAR and wafer curvature measurements. X-rays spectroscopy will include grazing incidence fluorescence. We will also implement a powerful and unique tool that is resonant surface diffraction that makes use of the X-rays beam energy tunability and polarizations for obtaining chemical information on the surface atoms. The modeling approaches including macroscopic approaches such as computational fluid dynamics, thermodynamic simulations, together with nanoscopic ab initio and kinetic Monte-Carlo calculations will be confronted to the experimental work in order to follow each step of the growth and finally to obtain a comprehensive better understanding of the material synthesis. We will design a specific state-of-the-art CVD/ALD reactor, and more generally a complete MOCVD/ALD facility that will movable and easy to hook up. It will be implemented and tested first at the LMGP laboratory and then on the beamline SIRIUS. We will first concentrate on the growth of ZnO nanowires and thin films, however we aim to design a deposition reactor that will have a broader application in the field of oxide materials. Such a setup will definitely be unique in France, another one is foreseen in Europe at Anka (Karlsruhe beamline Nano), and it will contribute in increasing the attractivity of large scale facility as SOLEIL. Our experience could lead SOLEIL to offer such an unique equipment to the scientific community. In summary the ultimate aim of the project is to build a methodology to obtain comprehensive understanding of the early stages of growth by MOCVD/ALD in order to optimize the properties of nanostructured oxides exhibiting extremely high potential in terms of applications for instance in the field of solar energy conversion or materials for ultra low scale integration in nanoelectronics.

Project coordination

Jean-Luc DESCHANVRES (CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE - DELEGATION REGIONALE RHONE-ALPES SECTEUR ALPES) – Jean-Luc.Deschanvres@grenoble-inp.fr

The author of this summary is the project coordinator, who is responsible for the content of this summary. The ANR declines any responsibility as for its contents.

Partner

SOLEIL SYNCHROTRON SOLEIL
IM2NP UNIVERSITE AIX-MARSEILLE III
LMOPS UNIVERSITE DE METZ
SIMAP CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE - DELEGATION REGIONALE RHONE-ALPES SECTEUR ALPES
LMGP CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE - DELEGATION REGIONALE RHONE-ALPES SECTEUR ALPES

Help of the ANR 1,141,701 euros
Beginning and duration of the scientific project: October 2011 - 48 Months

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