MiNaTorr : Procédés d’encapsulation sous vide poussé, réalisé collectivement sur tranche, pour MEMS/NEMS de haute performance. Application aux capteurs sismiques MEMS et aux détecteurs IR micro-bolométriques – MiNaTorr

Christian PISELLA (PME (petite et moyenne entreprise))

The author of this summary is the project coordinator, who is responsible for the content of this summary. The ANR declines any responsibility as for its contents.

Help of the ANR 818,696 euros
Beginning and duration of the scientific project: - 24 Months

• List of selected projects
• Permanent link to this summary on the ANR website (ANR-05-NANO-0066)
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